Wafer handling plasma – 3rd generation

Loading and unloading of graphite boats


To enhance the efficiency of solar cells, they are coated with an anti-reflective film. This layer is applied using a special technique called PECVD (see below).

During the batch process, a graphite boat is loaded with wafers and transported into a furnace. 

Baumann wafer handling plasma ...

... fully automates the loading and unloading process and uses specially developed gripper technology that guarantees safe handling with minimum wafer breakage.

A 6-axis robot integrated into the system enables complex loading and unloading procedures with maximum Precision.

An optional integrated vision system checks for material defects and monitors coating quality after unloading.

Wafer handling Plasma

Main characteristics:

• Throughput of up to 2200 w/h
• Breakage rate ≤ 0.1%
• Technical availability ≥ 98%


PECVD is the abbreviation for plasma-enhanced chemical vapour deposition, or plasma-assisted chemical vapour deposition (PACVD).

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