To enhance the efficiency of solar cells, they are coated with an
anti-reflective film. This layer is applied using a special technique
called PECVD (see below).
During the batch process, a graphite boat is loaded with wafers and transported into a furnace.
... fully automates the
loading and unloading process and uses specially developed gripper
technology that guarantees safe handling with minimum wafer breakage.
A 6-axis robot integrated into the system enables complex loading and unloading procedures with maximum Precision.
An optional integrated vision system checks for material defects and monitors coating quality after unloading.
• Throughput of up to 2200 w/h
• Breakage rate ≤ 0.1%
• Technical availability ≥ 98%
PECVD is the abbreviation for plasma-enhanced chemical vapour deposition, or plasma-assisted chemical vapour deposition (PACVD).